Women affected by the non-disclosure of the CervicalCheck audit will receive an ex-gratia payment of €20,000, the Cabinet has agreed.
The Minister for Health Simon Harris had asked an independent panel to examine the issue and to reach a compensatory figure for non-disclosure.
A spokesperson for Minister Harris said it is expected that payments will be made shortly.
The Scheme remains open, and those individuals who have not yet applied can still do so.
Speaking in the Dáil last month, Mr Harris said all 221 women affected by non-disclosure would be eligible to participate.